专利名称：MICROELECTROMECHANICAL
MICROPHONE
发明人：BRIOSCHI, Roberto,GRITTI, Alex,FORMOSA,
Kevin
申请号：EP16175518.6申请日：20160621公开号：EP3113509B1公开日：20180801
摘要：A micro-electro-mechanical microphone comprising: a substrate (2); a sensorchip (5), which is coupled to the substrate (2) and integrates a micro-electro-mechanicalelectro-acoustic transducer (35); a control chip (6), which is joined to the substrate (2) andis operatively coupled to the sensor chip (5); a bonding ring (16), which surrounds thesensor chip (5) and the control chip (6); a cap (3), which is coupled to the substrate (2) viathe bonding ring (16) and forms an acoustic chamber (4) that houses the control chip (6)and the sensor chip (5); a barrier (18), which extends between the bonding ring (16) andthe sensor chip (5) at a first distance and a second distance, respectively, therefrom, fordefining a first trench (19) between the bonding ring (16) and the barrier (18) and asecond trench (25) between the barrier (18) and the sensor chip (5).
申请人：ST MICROELECTRONICS SRL,STMICROELECTRONICS MALTA LTD
地址：IT,MT
国籍：IT,MT
代理机构：Bernotti, Andrea
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容