专利名称：Coating system and method for coating, as
well as coated articles
发明人：Christoph Moelle,Lars Bewig,Thomas
Kuepper
申请号：US11937279申请日：20071108公开号：US08268410B2公开日：20120918
专利附图：
摘要：In the case of CVD methods, comprising PECVD and PICVD methods, the aim ofthe invention is to improve the impurity-free and, as far as possible, temporally and
quantitatively precise feeding of process gases for the targeted layer systems. To thisend, the invention provides a coating system and a method for coating articles withalternating layers, in the case of which process gases are introduced in an alternatingfashion into a gas mixing point and mixed with a further gas and led to the reactionchamber, in which the deposition is carried out by producing a plasma.
申请人：Christoph Moelle,Lars Bewig,Thomas Kuepper
地址：Mainz DE,Bad Gandersheim DE,Bad Gandersheim DE
国籍：DE,DE,DE
代理机构：Kaplan Breyer Schwarz & Ottesen LLP
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