专利名称：Method of preparing and imaging a lamella
in a particle-optical apparatus
发明人：Foord, David,Miller, Thomas,Routh,
Brian,Tiemeijer, Peter,Janssen, Bart,Lazic,Ivan
申请号：EP12178060.5申请日：20120726公开号：EP2690648A1公开日：20140129
专利附图：
摘要：The invention relates to a method of preparing and imaging a sample (101)
using a particle-optical apparatus (100), equipped with an electron column (120) and anion beam column (140), a camera system (110), a manipulator (160) the methodcomprising the steps of Deriving a first ptychographic image of the sample from a firstelectron image, then thinning the sample, and forming a second ptychographic image ofthe sample. In an embodiments of the invention the seed image used for the secondimage is the first ptychografic image. In another embodiment the second ptychographicimage is the image of the layer removed during the thinning, In yet another embodimentthe inner potential of the sample is determined and dopant concentrations aredetermined.
申请人：FEI COMPANY
地址：5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
国籍：US
代理机构：Bakker, Hendrik
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