专利名称：Method and arrangement for optical
examination or processing of a sample
发明人：Ralf Wolleschensky,Michael Kempe申请号：US10539491申请日：20031129公开号：US07612884B2公开日：20091103
专利附图：
摘要：A method and an arrangement for the optical examination and/or processing ofa sample comprise an element for generating an illumination light, an element arrangeddownstream of the latter for spectral splitting of the illumination light for generating
spatially separated spectral components, an element for parallelizing the splitillumination light, an element for focusing the illumination light on or in the sample,wherein the spectral components are superposed, and an element for detecting thesample light, advantageously comprising an element for generating a short-pulseillumination light, an element arranged downstream of the latter for spectral splitting ofthe illumination light for generating spatially separated spectral components with pulselengths that are greater than the pulse length of the illumination light, wherein thesespectral components are combined again in the sample.
申请人：Ralf Wolleschensky,Michael Kempe
地址：Schoeten DE,Kunitz DE
国籍：DE,DE
代理机构：Reed Smith LLP
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