专利名称：High definition heater and method of
operation
发明人：Kevin Ptasienski,Kevin Robert Smith,Cal
Thomas Swanson,Philip Steven
Schmidt,Mohammad Nosrati,Jacob RobertLindley,Allen Norman Boldt,SanhongZhang,Louis P. Steinhauser,Dennis StanleyGrimard
申请号：US13599648申请日：20120830公开号：US09263305B2公开日：20160216
专利附图：
摘要：An apparatus is provided, by way of example, a heater for use in semiconductorprocessing equipment that includes a base functional layer having at least one functionalzone. A substrate is secured to the base functional layer, and a tuning layer is secured tothe substrate opposite the base functional layer. The tuning layer includes a plurality ofzones that is greater in number than the zones of the base functional layer, and thetuning layer has lower power than the base functional layer. Further, a component, suchas a chuck by way of example, is secured to the tuning layer opposite the substrate. Thesubstrate defines a thermal conductivity to dissipate a requisite amount of power fromthe base functional layer.
申请人：Kevin Ptasienski,Kevin Robert Smith,Cal Thomas Swanson,Philip StevenSchmidt,Mohammad Nosrati,Jacob Robert Lindley,Allen Norman Boldt,SanhongZhang,Louis P. Steinhauser,Dennis Stanley Grimard
地址：O'Fallon MO US,Columbia MO US,St. Louis MO US,Winona MN US,Fenton MOUS,St. Louis MO US,Kirkwood MO US,Ballwin MO US,St. Louis MO US,Ann Arbor MI US
国籍：US,US,US,US,US,US,US,US,US,US
代理机构：Brinks Gilson & Lione
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