专利名称：Method and system for improving the
efficiency of a mechanical alignment tool
发明人：Uwe Knappe,Jan Raebiger,Uwe Schulze,Rolf
Seltmann
申请号：US10621663申请日：20030717
公开号：US20040167640A1公开日：20040826
专利附图：
摘要：A technique is disclosed that allows alignment of substrates on a run-to-runbasis by using the position data of one or more previously aligned substrates to
determine a setpoint of a pre-alignment process for one or more subsequent substrates.The setpoint may also be determined on the basis of a predefined characteristic of thesubstrates to be aligned.
申请人：KNAPPE UWE,RAEBIGER JAN,SCHULZE UWE,SELTMANN ROLF
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容