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In-situ corrosion resistant substrate support coat

来源：飒榕旅游知识分享网

专利内容由知识产权出版社提供

专利名称：In-situ corrosion resistant substrate support

coating

发明人：Mei Chang,Chien-Teh Kao,Juno Yu-Ting

Huang

申请号：US14291781申请日：20140530公开号：US09551070B2公开日：20170124

专利附图：

摘要：Corrosion resistant substrate supports and methods of making corrosionresistant substrate supports are provided herein. In some embodiments, a method of

making corrosion resistant substrate supports includes exposing the substrate supportdisposed within a substrate processing chamber to a process gas comprising analuminum containing precursor; and depositing an aluminum containing layer atopsurfaces of the substrate support.

申请人：APPLIED MATERIALS, INC.

地址：Santa Clara CA US

国籍：US

代理机构：Moser Taboada

代理人：Alan Taboada

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