Improved micromechanical part allowing an electric

专利名称：Improved micromechanical part allowing an

electric discharge

发明人：Glassey, Marc-André,Gygax, Pierre申请号：EP12190569.9申请日：20121030公开号：EP25568B1公开日：20170215

摘要：The micromechanical part (1) has a core (11) partially made of a semiconductormaterial having high electric conductivity, and a coating (12) made of an electricallyinsulating material such as diamond or silicon oxide, where the coating is provided on asurface of the core. The surface of the core is releasable from the coating so that anelectrical discharge occurs between the core and an external body (2). The core includesan inner layer and an outer layer, where the electrical conductivity of the outer layer isgreater than that of the inner layer. An independent claim is also included for a methodfor manufacturing a micromechanical part.

申请人：Sigatec SA,SIGATEC SA,SIGATEC SA

地址：CH

国籍：CH

代理机构：BOVARD AG

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