专利名称：Method and apparatus for measuring
properties of thin materials
发明人：Canino, Lawrence S.申请号：EP85300227.7申请日：19850114公开号：EP0150945A2公开日：19850807
专利附图：
摘要：@ A method and means for measuring and/or determining characteristics of amaterial by analyzing the characteristics of an energy beam incident upon and affectedby the sample. Polarized radiant energy reflected and/or transmitted by the material
sample is analyzed to infer optical properties such as index of refraction, and physicalproperties such as material thickness. The invention is not subject to the disadvantages ofprior art measuring systems, in that absolute detected light values are not used,measurement of varying wavelengths of light are not necessary, surface defectscontribute a balanced effect in the calculations so as to effectively cancel out, highlyaccurate angular measuring devices are not needed, precision nulling instruments areavoided, system parameter drift effects upon the measurement is avoided, inter alia.According to the invention, a method and means are provided for measuring an opticalproperty of a thin material sample having a transmission efficiency of greater than zerofor an impinging beam of radiant energy. A source beam of radiant energy at a givenwavelength and of varying polarization direction is provided, and the polarization-varyingbeam is directed onto an entry surface of the thin material sample at a predeterminedangle with respect thereto. The beam leaving the sample is analyzed to determine therelative amplitudes of first and second polarized components thereof. The opticalproperty of the sample is determined from a mathematical model equating the opticalproperty to a relationship between said wavelength of the source beam, the
predetermined angle, and the results of detecting and analyzing the beam exiting thesample.
申请人：Canino, Lawrence S.
地址：4815 Milne Drive Torrance California 90505 US
国籍：US
代理机构：Newstead, Michael John
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